金剛石薄膜的研究現(xiàn)狀和展望

金剛石薄膜的研究現(xiàn)狀和展望

摘要:  由于金剛石薄膜具有最高的硬度，最高的熱導(dǎo)率，高的絕緣性，高的光透過率，以及能耐酸、耐熱、耐輻射等優(yōu)異性能，所以其能廣泛地應(yīng)用于社會(huì)中的各領(lǐng)域。自人們使用化學(xué)氣相沉積（CVD）法在非金剛石的襯底上形成金剛石膜后，各國(guó)技術(shù)人員便都在不斷地深入研究CVD法合成金剛石薄膜的技術(shù)，以保證能達(dá)到低成本投入、高效益收入、多方面應(yīng)用。本文介紹了金剛石薄膜的結(jié)構(gòu)以及在這種結(jié)構(gòu)下金剛石薄膜所具有的獨(dú)特性能，重點(diǎn)介紹了金剛石薄膜制備方法的進(jìn)展以及金剛石薄膜在社會(huì)各領(lǐng)域的應(yīng)用情況，并列出了國(guó)內(nèi)外金剛石薄膜研究進(jìn)展的差異，以反映出國(guó)內(nèi)金剛石薄膜未來(lái)發(fā)展的方向，進(jìn)而簡(jiǎn)單論述了金剛石薄膜未來(lái)發(fā)展的趨勢(shì)。

關(guān)鍵字:  金剛石薄膜；化學(xué)氣相沉積CVD；制備及應(yīng)用

Diamond thin film research present situation and forecast

Abstract:  Because diamond films have the highest hardness, the highest thermal conductivity, high insulation, high optical transmittance, and can also express excellent acid, heat and radiation resistance performance, so they can be widely used in various fields of the society. Since the use of chemical vapor deposition (CVD) method in the non-diamond substrates to fabricate diamond film, National technical staff will continue to have study CVD synthetic diamond film technology in-depth to ensure that input can achieve low-cost, high-income returns, many applications. This paper describes the structure of diamond films and the unique properties of this diamond films. In this paper, I focus on the introduction of diamond film preparation methods, the progress and the application of diamond thin films in all areas of society. In the end of the paper, the domestic diamond films progress is compared with foreign ones to reflect domestic diamond film direction for future development, and the future development of diamond film trend is briefly discussed.

Keywords:  Diamond thin film;  Chemical vapor deposition CVD;  Preparation and Application
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